Lothar Pfitzner, Head of Semiconductor Manufacturing, Fraunhofer, Germany
Short biography: Lothar Pfitzner holds an M.S. (Dipl.-Ing.) degree in Materials Science and Ph.D. (Dr.-Ing.) in Electronics Engineering, both from the University of Erlangen-Nuremberg. Since 1985 he has been heading the business unit 'Semiconductor Manufacturing' of the Fraunhofer Institute of Integrated Systems and Device Technology (IISB) in Erlangen, performing research and development in the fields of process development, advanced process control, on-line and in-situ metrology, integrated vacuum cluster tools, contamination control, semiconductor equipment assessment, and innovative semiconductor manufacturing methods including 450mm technologies. Since 1988 he has been lecturer on 'Semiconductor Manufacturing Techniques' for students of Mechanical Engineering and students of Electrical Engineering at the University of Erlangen-Nuremberg, being appointed Professor for Microelectronics in 2003.